Petri net modeling and cycle-time analysis of dual-arm cluster tools with wafer revisiting

Abstract : There are wafer fabrication processes in cluster tools that require wafer revisiting. If a swap strategy is applied to dual-arm cluster tools handling wafer revisiting, a three-wafer periodical process is formed with three wafers completed in each period. Such a period contains three cycles in a revisiting process and three cycles in a nonrevisiting one. Hence, analysis and scheduling of such tools become very complicated. In this paper, a Petri net (PN) model is developed to describe their operations. Based on it, it is found that, if a swap strategy is applied, such tools are always in a transient state. A systematic method is then presented to analyze their performance. With the help of the proposed PN model, this work, for the first time, derives the optimality conditions of three-wafer period scheduling. Industrial application examples are given to show the results.
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Submitted on : Tuesday, September 25, 2012 - 5:33:49 PM
Last modification on : Wednesday, January 22, 2020 - 11:39:48 AM

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Naiqi Wu, Feng Chu, Chengbin Chu, Mengchu Zhou. Petri net modeling and cycle-time analysis of dual-arm cluster tools with wafer revisiting. IEEE Transactions on Systems, Man and Cybernetics, Part A: Systems and Humans, Institute of Electrical and Electronics Engineers, 2013, 43 (1), pp.196--207. ⟨10.1109/TSMCA.2012.2187890⟩. ⟨hal-00735482⟩

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