Y. Yang, C. Callegari, X. Feng, K. Ekinci, and M. Roukes, Zeptogram-Scale Nanomechanical Mass Sensing, Nano Letters, vol.6, issue.4, pp.583-586, 2006.
DOI : 10.1021/nl052134m

M. Li, H. Tang, and M. Roukes, Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications, Nature Nanotechnology, vol.78, issue.2, pp.114-120, 2007.
DOI : 10.1038/nnano.2006.208

K. Jensen, K. Kim, and A. , An atomic-resolution nanomechanical mass sensor, Nature Nanotechnology, vol.246, issue.9, pp.533-537, 2008.
DOI : 10.1038/nnano.2008.200

N. Kacem, S. Hentz, D. Pinto, B. Reig, and V. Nguyen, Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors, Nanotechnology, vol.20, issue.27, 2009.
DOI : 10.1088/0957-4484/20/27/275501
URL : https://hal.archives-ouvertes.fr/hal-00505123

N. Kacem, J. Arcamone, F. Perez-murano, and S. Hentz, Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications, Journal of Micromechanics and Microengineering, vol.20, issue.4, p.45023, 2010.
DOI : 10.1088/0960-1317/20/4/045023

W. Zhang, G. Meng, and D. Chen, Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices, Sensors, vol.7, issue.5, pp.760-796, 2007.
DOI : 10.3390/s7050760

R. Batra, M. Porfiri, and D. Spinello, Review of modeling electrostatically actuated microelectromechanical systems, Smart Materials and Structures, vol.16, issue.6, pp.23-31, 2007.
DOI : 10.1088/0964-1726/16/6/R01

R. Lifshitz and M. Cross, Reviews of Nonlinear Dynamics and Complexity, Ch. Nonlinear Dynamics of Nanomechanical and Micromechanical Resonators, pp.1-52, 2008.

S. Pamidighantam, R. Puers, K. Baert, and H. Tilmans, Pull-in voltage analysis of electrostatically actuated beam structures with fixed$ndash$fixed and fixed$ndash$free end conditions, Journal of Micromechanics and Microengineering, vol.12, issue.4, p.458, 2002.
DOI : 10.1088/0960-1317/12/4/319

L. Shao, M. Palaniapan, and W. Tan, The nonlinearity cancellation phenomenon in micromechanical resonators, Journal of Micromechanics and Microengineering, vol.18, issue.6, p.65014, 2008.
DOI : 10.1088/0960-1317/18/6/065014

H. Tilmans and R. Legtenberg, Electrostatically driven vacuum-encapsulated polysilicon resonators, Sensors and Actuators A: Physical, vol.45, issue.1, pp.67-84, 1994.
DOI : 10.1016/0924-4247(94)00813-2

E. Abdel-rahman, M. Younis, and A. Nayfeh, Characterization of the mechanical behavior of an electrically actuated microbeam, Journal of Micromechanics and Microengineering, vol.12, issue.6, pp.759-766, 2002.
DOI : 10.1088/0960-1317/12/6/306

M. Younis, E. Abdel-rahman, and A. Nayfeh, A reduced-order model for electrically actuated microbeam-based MEMS, Journal of Microelectromechanical Systems, vol.12, issue.5, pp.672-680, 2003.
DOI : 10.1109/JMEMS.2003.818069

M. Younis and A. Nayfeh, A study of the nonlinear response of a resonant microbeam to an electric actuation, Nonlinear Dynamics, vol.31, issue.1, pp.91-117, 2003.
DOI : 10.1023/A:1022103118330

W. Xie, H. Lee, and S. Lim, Nonlinear dynamic analysis of mems switches by nonlinear modal analysis, Nonlinear Dynamics, pp.31-243, 2003.

J. Kuang and C. Chen, Dynamic characteristics of shaped micro-actuators solved using the differential quadrature method, Journal of Micromechanics and Microengineering, vol.14, issue.4, pp.647-655, 2004.
DOI : 10.1088/0960-1317/14/4/028

F. Najar, S. Choura, S. El-borgi, E. Abdel-rahman, and A. Nayfeh, Modeling and design of variable-geometry electrostatic microactuators, Journal of Micromechanics and Microengineering, vol.15, issue.3, pp.419-429, 2005.
DOI : 10.1088/0960-1317/15/3/001

A. Nayfeh, M. Younis, and E. Abdel-rahman, Dynamic pull-in phenomenon in MEMS resonators, Nonlinear Dynamics, vol.20, issue.1-2, pp.153-163, 2007.
DOI : 10.1007/s11071-006-9079-z

S. Krylov, Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures, International Journal of Non-Linear Mechanics, vol.42, issue.4, pp.626-642, 2007.
DOI : 10.1016/j.ijnonlinmec.2007.01.004

R. Batra, M. Porfiri, and D. Spinello, Vibrations of narrow microbeams predeformed by an electric field, Journal of Sound and Vibration, vol.309, issue.3-5, pp.600-612, 2008.
DOI : 10.1016/j.jsv.2007.07.030

M. M. Zand, M. Ahmadian, and B. Rashidian, Semi-analytic solutions to nonlinear vibrations of microbeams under suddenly applied voltages, Journal of Sound and Vibration, vol.325, issue.1-2, pp.382-396, 2009.
DOI : 10.1016/j.jsv.2009.03.023

H. Nishiyama and M. Nakamura, Capacitance of a strip capacitor, IEEE Transactions on Components, Hybrids, and Manufacturing Technology, vol.13, issue.2, pp.417-423, 1990.
DOI : 10.1109/33.56178

P. C. Chao, C. Chiu, and T. Liu, DC dynamic pull-in predictions for a generalized clamped???clamped micro-beam based on a continuous model and bifurcation analysis, Journal of Micromechanics and Microengineering, vol.18, issue.11, p.115008, 2008.
DOI : 10.1088/0960-1317/18/11/115008

V. Rochus, D. J. Rixen, and J. C. , Electrostatic coupling of MEMS structures: transient simulations and dynamic pull-in, Nonlinear Analysis: Theory, Methods & Applications, vol.63, issue.5-7, pp.1619-1633, 2005.
DOI : 10.1016/j.na.2005.01.055

G. Michon, L. Manin, R. Rémond, R. Parker, and R. Dufour, Parametric Instability of an Axially Moving Belt Subjected to Multifrequency Excitations: Experiments and Analytical Validation, Journal of Applied Mechanics, vol.75, issue.4, p.41004, 2008.
DOI : 10.1115/1.2910891
URL : https://hal.archives-ouvertes.fr/hal-00381378

S. Lau and Y. Cheung, Amplitude Incremental Variational Principle for Nonlinear Vibration of Elastic Systems, Journal of Applied Mechanics, vol.48, issue.4, pp.959-964, 1981.
DOI : 10.1115/1.3157762

S. Nacivet, C. Pierre, F. Thouverez, and L. , A dynamic Lagrangian frequency???time method for the vibration of dry-friction-damped systems, Journal of Sound and Vibration, vol.265, issue.1, pp.201-219, 2003.
DOI : 10.1016/S0022-460X(02)01447-5

B. Cochelin and C. Vergez, A high order purely frequency-based harmonic balance formulation for continuation of periodic solutions, Journal of Sound and Vibration, vol.324, issue.1-2, pp.243-262, 2009.
DOI : 10.1016/j.jsv.2009.01.054
URL : https://hal.archives-ouvertes.fr/hal-00315288

L. Azrar, B. Cochelin, N. Damil, and M. , An asymptotic-numerical method to compute the postbuckling behaviour of elastic plates and shells, International Journal for Numerical Methods in Engineering, vol.13, issue.8, pp.1251-1277, 1993.
DOI : 10.1002/nme.1620360802

B. Cochelin, A path-following technique via an asymptotic-numerical method, Computers & Structures, vol.53, issue.5, pp.1181-1192, 1994.
DOI : 10.1016/0045-7949(94)90165-1

S. Baguet and B. Cochelin, On the behaviour of the ANM continuation in the presence of bifurcations, Communications in Numerical Methods in Engineering, vol.28, issue.6, pp.459-471, 2003.
DOI : 10.1002/cnm.605
URL : https://hal.archives-ouvertes.fr/hal-00088346

A. Nayfeh and B. Balachandran, Applied Nonlinear Dynamics: Analytical, Computational, and Experimental Methods, Nonlinear Science, 1995.
DOI : 10.1002/9783527617548

R. Dufour and A. Berlioz, Parametric Instability of a Beam Due to Axial Excitations and to Boundary Conditions, Journal of Vibration and Acoustics, vol.120, issue.2, pp.461-467, 1998.
DOI : 10.1115/1.2893852

K. Brueckner, V. Cimalla, F. Niebelschütz, R. Stephan, K. Tonisch et al., Strainand pressure-dependent RF response of microelectromechanical resonators for sensing applications, Journal of Micromechanics and Microengineering, vol.17, issue.10, 2007.

V. Sazonova, A tunable carbon nanotube resonator, 2006.

N. Kacem and S. Hentz, Bifurcation topology tuning of a mixed behavior in nonlinear micromechanical resonators, Applied Physics Letters, vol.95, issue.18, p.183104, 2009.
DOI : 10.1063/1.3258654
URL : https://hal.archives-ouvertes.fr/hal-00505099

V. Kaajakari, J. Koskinen, and T. Mattila, Phase noise in capacitively coupled micromechanical oscillators, Ultrasonics , Ferroelectrics and Frequency Control, IEEE Transactions on, vol.52, issue.12, pp.2322-2331, 2005.