4H-SIC p-type doping determination from secondary electrons imaging

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https://hal.archives-ouvertes.fr/hal-02066375
Contributor : Frédérique Ducroquet <>
Submitted on : Wednesday, March 13, 2019 - 1:05:20 PM
Last modification on : Wednesday, April 10, 2019 - 5:34:05 PM

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  • HAL Id : hal-02066375, version 1

Citation

M Kayambaki, N. Makris, K. Tsagarakis, Hervé Peyre, A Stavrinidis, et al.. 4H-SIC p-type doping determination from secondary electrons imaging. 12th European Conference on Silicon Carbide and Related Materials (ECSCRM), Sep 2018, Birmingham, United Kingdom. ⟨hal-02066375⟩

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