A Fully Integrated 32 nm MultiProbe for Dynamic PVT Measurements within Complex Digital SoC

Lionel Vincent (1) , Edith Beigné (1) , Laurent Alacoque (1) , Suzanne Lesecq (1) , Catherine Bour (1) , Philippe Maurine (2)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 SysMIC - Conception et Test de Systèmes MICroélectroniques

This paper deals with the design of a compact Process, Voltage and Temperature (PVT) probe architecture, in 32nm CMOS technology. The sensor, hereafter named MultiProbe, is composed of 7 different ring oscillators, each one presenting a particular sensitivity to PVT variations. The architecture allows MultiProbes to be chained, so that a single controller is needed. Simulation results exhibit the non-linearity behavior of the ring oscillators under temperature and voltage variations as well as their particular behavior. Due to their small size, the Multiprobe blocks can be easily integrated within a complex digital SoC architecture.

Mots clés: AVFS; DVFS; calibration; digital; sensors; low-power; architecture; monitoring; temperature; variability; voltage; drop; power management; multiprobe; ring oscillator

Domaines: Micro et nanotechnologies/Microélectronique; Electronique

Lionel Vincent, Edith Beigné, Laurent Alacoque, Suzanne Lesecq, Catherine Bour, et al.. A Fully Integrated 32 nm MultiProbe for Dynamic PVT Measurements within Complex Digital SoC. VARI: International Workshop on CMOS Variability, May 2011, Grenoble, France. ⟨hal-01067989⟩