Application d'une nouvelle conception d'architecture à une machine de mesure de résolution nanométrique

Application of a new architecture design to a measuring machine with a nanometric resolution

Ludovic Lahousse (1) , Jean-Marie David (1) , Stéphane Leleu (1) , Georges-Pierre Vailleau (2) , Sébastien Ducourtieux (2)

1 L2MA - Laboratoire de Métrologie et de Mathématiques Appliquées
2 LNE - Laboratoire National de Métrologie et d'Essais [Trappes]

The purpose of this paper is to present original concepts offering an uncertainty control advancement for measuring machines. Those concepts were developed from the analysis of phenomena that reduce the machine accuracy constructed around principles of standard architecture. A machine being developed is a concrete materialization of those concepts.

Mots clés: Nanometrology; Metrological loop; design of precision measuring machine; dissociated metrological structure

Domaines: Mécanique [physics.med-ph]; Génie mécanique [physics.class-ph]; Génie mécanique [physics.class-ph]

Ludovic Lahousse, Jean-Marie David, Stéphane Leleu, Georges-Pierre Vailleau, Sébastien Ducourtieux. Application d'une nouvelle conception d'architecture à une machine de mesure de résolution nanométrique

Application of a new architecture design to a measuring machine with a nanometric resolution

. Revue française de métrologie, 2005, 2005-4, pp.35-43. ⟨hal-00941291⟩