Twin-scale Vernier micro-pattern for Visual Measurement of 1-D in-plane absolute displacements with increased range-to-resolution ratio.

July Andrea Galeano Zea (1) , Patrick Sandoz (1) , Guillaume J. Laurent (1) , Lucas Lopes Lemos (1) , Cédric Clévy (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

This paper presents a visual method for 1D in-plane displacement measurement which combines a resolution of a few nanometers with an unambiguous excursion range of 168 µm. Furthermore, position retrieval is only based on elementary phase computations and thus might become compatible with high-rate processing by implementing the processing algorithm on high speed computing architectures like a DSP or a FPGA device. The method is based on a twin scale Vernier micro-pattern fixed on the moving target of interest. The two periodic grids have slightly different periods in order to encode the period order within the phase difference observed between the two sub-patterns. As a result, an unambiguous range of 168 µm is obtained from grid periods of 8 µm and 8.4 µm. The resolution is evaluated to be of 11.7 nm despite remaining mechanical disturbances. Differential measurements demonstrated indeed a measurement accuracy better than 5 nm.

Domaines: Micro et nanotechnologies/Microélectronique

July Andrea Galeano Zea, Patrick Sandoz, Guillaume J. Laurent, Lucas Lopes Lemos, Cédric Clévy. Twin-scale Vernier micro-pattern for Visual Measurement of 1-D in-plane absolute displacements with increased range-to-resolution ratio.. International Journal of Optomechatronics, 2013, 7, pp.222-234. ⟨10.1080/15599612.2013.808493⟩. ⟨hal-00869529⟩