Multiscale modeling and systemic analysis of chemical vapor deposition processes

Nikolaos Cheimarios (1)

1 NTUA - National Technical University of Athens [Athens]

. Two multiscale computational frameworks are proposed for coupling/linking the co-existing scales in chemical vapor deposition (CVD)processes: From the macro-scale of a CVD reactor (~cm or m) to the transport inside micro-features (~μm) and kinetic Monte Carlo techniques in the nano-scale (~nm). To accelerate the computations parallel processing techniques are used. Moreover, a computational framework, based on projection type methods, is proposed to enable "black box" CFD codes to perform nonlinear systemic analysis tasks.

Mots clés: Mutliscale modeling; nonlinear analysis; parallel computing; chemical vapor derposition

Domaines: Analyse numérique [math.NA]; Mécanique [physics]; Sciences de l'ingénieur [physics]

Nikolaos Cheimarios. Multiscale modeling and systemic analysis of chemical vapor deposition processes. 2nd ECCOMAS Young Investigators Conference (YIC 2013), Sep 2013, Bordeaux, France. ⟨hal-00855848⟩