New simple optical sensor: from nanometer resolution to centimeter displacement range

Alexia Missoffe (1) , Luc Chassagne (1) , Suat Topsu (1) , Pascal Ruaux (1) , Barthélemy Cagneau (1) , Yasser Alayli (1)

1 LISV - Laboratoire d'Ingénierie des Systèmes de Versailles

A very simple displacement sensor is presented with nanometric resolution over centimetric travel range. The compact system is composed of a laser-diode module and a photodiode array leading to a non-contact sensor. With a corner cube configuration, it is not sensitive to most of main mechanical defects of the mobile platform. The use of an optical fiber and a normalization process inspired from classical four-quadrant detectors allows high repeatability and minimal drifts. This paper exposes the setup, simulations and experimental results. Several displacements over millimeters range with a resolution of 1.2 nm sustain the simulations.

Mots clés: High resolution sensor; Nanodisplacement; Distance measurement; Low-noise electronics; Photodetector

Domaines: Micro et nanotechnologies/Microélectronique; Optique [physics.optics]

Alexia Missoffe, Luc Chassagne, Suat Topsu, Pascal Ruaux, Barthélemy Cagneau, et al.. New simple optical sensor: from nanometer resolution to centimeter displacement range. Sensors and Actuators A: Physical , 2012, 176, pp.46-52. ⟨10.1016/j.sna.2012.01.007⟩. ⟨hal-00834557⟩