Synthesis of carbon nanotubes by plasma-enhanced CVD process: gas phase study of synthesis conditions

Michal Guláš (1) , Costel Sorin Cojocaru (2) , Claudiu Fleaca (1) , Samir Farhat (3) , Pavel Veis (4) , Francois Le Normand (1)

1 IPCMS - Institut de Physique et Chimie des Matériaux de Strasbourg
2 NanoMaDe
3 LIMHP - Laboratoire d'Ingénierie des Matériaux et des Hautes Pressions
4 Department of Experimental Physics [UNIBA Bratislava]

To support experimental investigations, a model based on ChemkinTM software was used to simulate gas phase and surface chemistry during plasma-enhanced catalytic CVD of carbon nanotubes. According to these calculations, gas phase composition, etching process and growth rates are calculated. The role of several carbon species, hydrocarbon molecules and ions in the growth mechanism of carbon nanotubes is presented in this study. Study of different conditions of gas phase activation sources and pressure is performed.

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Michal Guláš, Costel Sorin Cojocaru, Claudiu Fleaca, Samir Farhat, Pavel Veis, et al.. Synthesis of carbon nanotubes by plasma-enhanced CVD process: gas phase study of synthesis conditions. European Physical Journal: Applied Physics, 2008, 43 (03), pp.353--356. ⟨hal-00796245⟩