Laterally organized carbon nanotube arrays based on hot-filament chemical vapor deposition

Ki Hwan Kim (1) , Emmanuel Lefeuvre (1) , Marc Châtelet (1) , Didier Pribat (2) , Costel Sorin Cojocaru (3)

1 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]
2 Department of Energy Science
3 NanoMaDe

Lateral porous anodic alumina (PAA) templates were used to organize carbon nanotubes (CNTs) grown by a hot-filament assisted chemical vapor deposition (HFCVD) process. For the CNT growth, we used a modified "home-made" HFCVD system with two independently powered filaments which are fitted respectively on the methane (CH4) gas line, which serves as a carbon precursor and on the hydrogen (H2) gas line, which acts as an etching agent for the parasitic amorphous carbon. Various activation powers of the hot filaments were used to directly or indirectly decompose the gas mixtures at relatively low substrate temperatures. A parametric study of the HFCVD process has been carried out for optimizing the confined CNTs growth inside the lateral PAA templates.

Mots clés: Porous anodic alumina Carbon nanotubes Hot-filament chemical vapor deposition

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Ki Hwan Kim, Emmanuel Lefeuvre, Marc Châtelet, Didier Pribat, Costel Sorin Cojocaru. Laterally organized carbon nanotube arrays based on hot-filament chemical vapor deposition. Thin Solid Films, 2011, 519, pp.4598-4602. ⟨10.1016/j.tsf.2011.01.334⟩. ⟨hal-00794039⟩