Control of Adhesion using Surface Functionalisations for Robotic Microhandling.

Jérôme Dejeu (1) , Patrick Rougeot (1) , Sophie Lakard (2) , Michaël Gauthier (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
2 UTINAM - Univers, Transport, Interfaces, Nanostructures, Atmosphère et environnement, Molécules (UMR 6213)

Robotic microhandling is a promising way to assemble microcomponents in order to manufacture new generation of Hybrid Micro ElectroMechanical Systems (HMEMS). However, at the scale of several micrometers, adhesion phenomenon highly perturbs the micro-objects release and the positioning. This phenomenon is directly linked to both the object and the gripper surface mechanical and chemical properties. The control of the adhesion properties requires multidisciplinary approaches including roughness control, mechanical properties control and chemical surface functionalisation. We propose to control adhesion by using chemical surface functionalisations by intrinsic conducting polymer electrodeposition or Self-Assembly Monolayer (SAM) and using surface structuration.

Domaines: Micro et nanotechnologies/Microélectronique

Jérôme Dejeu, Patrick Rougeot, Sophie Lakard, Michaël Gauthier. Control of Adhesion using Surface Functionalisations for Robotic Microhandling.. IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS'12., Oct 2012, Vilamoura, Algarve, Portugal. pp.2307-2312. ⟨hal-00772424⟩