Calibration and Validation of XY Micropositioners with Vision.

Ning Tan (1) , Cédric Clévy (1) , Guillaume J. Laurent (1) , Nicolas Chaillet (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Accuracy is very important criterion for micromanipulation systems, especially for microassembly. In this paper, we propose a full procedure of kinematic calibration and validation for XY micropositioners, which are used as coarse positioning in our microassembly platform. Based on vision, two methods (self-calibration and classical calibration) are presented, implemented, tested and compared. The differential evolution (DE) algorithm is applied to identify the kinematic parameters. After calibrations, we perform tests of accuracy and repeatability through controlling the micropositioners via inverse kinematics.

Domaines: Micro et nanotechnologies/Microélectronique

Ning Tan, Cédric Clévy, Guillaume J. Laurent, Nicolas Chaillet. Calibration and Validation of XY Micropositioners with Vision.. IEEE/ASME International Conference on Avanced Intelligent Mechatronics, AIM'12., Jul 2012, Kaohsiung, Taiwan. pp.256-261. ⟨hal-00734004⟩