Spectroscopic characterization of an atmospheric pressure -jet plasma source

N Bibinov (1) , N Knake (2) , H Bahre (2) , P Awakowicz (1) , V Schulz-von Der Gathen (2)

1 Institute for Electrical Engineering and Plasma Technology
2 Institute for Applied Plasma Physics

A new method for determination of plasma parameters at atmospheric pressure conditions is formulated and applied for characterization of a radio frequency µ-jet plasma source using He/O 2 mixture. Applying absolutely-calibrated optical emission spectroscopy and numerical simulation, the gas temperature in active plasma region and plasma parameters (electron density and electron distribution function) are determined. The steadystate concentrations of different species such as oxygen atom and ozone the plasma channel and in the effluent of the plasma source are calculated using measured plasma parameters and gas temperature. On the other hand, spatial distribution of steady-state densities of these species are measured using emission and absorption spectroscopy. A comparison of the results thus obtained and the validation of the new method against two-photon absorption laser-induced fluorescence spectroscopy measurements are discussed. In addition, the influence of the surface processes and gas flow regime on the loss of the active species in the plasma source are discussed.

Mots clés: 52.50.Dg; 52.80.Pi; 52.70.Kz 2

N Bibinov, N Knake, H Bahre, P Awakowicz, V Schulz-von Der Gathen. Spectroscopic characterization of an atmospheric pressure -jet plasma source. Journal of Physics D: Applied Physics, 2011, 44 (34), pp.345204. ⟨10.1088/0022-3727/44/34/345204⟩. ⟨hal-00646922⟩