Analytical and numerical modeling of AlGaN/GaN/AlN heterostructure based cantilevers for mechanical sensing in harsh environments

S. Vittoz (1) , Libor Rufer (1) , G.P. Rehder (1) , U. Heinle (2) , P. Benkart (2)

1 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés
2 microGaN GmbH

Mots clés: HEMT; harsh environment; Sensor

Domaines: Micro et nanotechnologies/Microélectronique

S. Vittoz, Libor Rufer, G.P. Rehder, U. Heinle, P. Benkart. Analytical and numerical modeling of AlGaN/GaN/AlN heterostructure based cantilevers for mechanical sensing in harsh environments. European Conference on sensors, actuators and microsystems (Eurosensors'10), Sep 2010, Linz, Austria. pp.91-94, ⟨10.1016/j.proeng.2010.09.055⟩. ⟨hal-00639959⟩