Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect

E Schüngel (1) , Q-Z Zhang (2) , S Iwashita (1) , J Schulze (1, 3) , L-J Hou (4) , Y-N Wang (5) , U Czarnetzki (1)

1 Insitute for Plasma and Atomic Physics
2 School of Physics and Optoelectronic Technology
3 Research Institute for Solid State Physics and Optics [Budapest]
4 MPE - Max Planck Institute for Extraterrestrial Physics
5 School of Physics and Optoelectronic Technology

By using a combined experimental, numerical and analytical approach, we investigate the control of plasma properties via the Electrical Asymmetry Effect (EAE) in a capacitively coupled oxygen discharge. In particular, we present the first experimental investigation of the EAE in electronegative discharges. A dual-frequency voltage source of 13.56 MHz and 27.12 MHz is applied to the powered electrode and the discharge symmetry is controlled by adjusting the phase angle θ between the two harmonics. It is found that the bulk position and density profiles of positive ions, negative ions, and electrons have a clear dependence on θ, while the peak densities and the electronegativity stay rather constant, largely due to the fact that the time averaged power absorption by electrons is almost independent of θ. This indicates that the ion flux towards the powered electrode remains almost constant. Meanwhile, the dc self-bias and, consequently, the sheath widths and potential profile can be effectively tuned by varying θ. This enables a flexible control of the ion bombarding energy at the electrode. Therefore, our work proves the effectiveness of the EAE to realize separate control of ion flux and ion energy in electronegative discharges. At low pressure, the strength of resonance oscillations, which are found in the current of asymmetric discharges, can be controlled with θ.

Mots clés: 52.80.Pi; 52.50.-b; 52.27.Cm; 52.35.Fp

E Schüngel, Q-Z Zhang, S Iwashita, J Schulze, L-J Hou, et al.. Control of plasma properties in capacitively coupled oxygen discharges via the electrical asymmetry effect. Journal of Physics D: Applied Physics, 2011, 44 (28), pp.285205. ⟨10.1088/0022-3727/44/28/285205⟩. ⟨hal-00633995⟩