Optimization of the process control in a semiconductor company. Model and case study of defectivity sampling

M'hammed Sahnoun (1, 2, 3) , Samuel Bassetto (4, 5) , Soidri Bastoini (6) , Philippe Vialetelle (6)

1 Dep. of Ind. Eng.
2 G-SCOP - Laboratoire des sciences pour la conception, l'optimisation et la production
3 LINEACT - Laboratoire d'Innovation Numérique pour les Entreprises et les Apprentissages au service de la Compétitivité des Territoires
4 Dep. of Ind. Eng.
5 EPM - École Polytechnique de Montréal
6 ST-CROLLES - STMicroelectronics [Crolles]

This paper studies the skip, under some assumptions, of process control operations. The case of one tool, one enhanced buffer and one metrology tool of a monotonic parameter is analyzed. The paper presents circumstances in which control plan can be optimized due to buffer behavior's. After presenting the industrial issue of defectivity, the article goes through literature review. The article follows by presenting the model and steps toward industrial development. A demonstrator is then presented applied at a case study of defectivity sampling. A test over a 300mm wafer-fab data set shows serious improvements: around 35% of defectivity controls have been allowed to be skipped compared to the static sampling plan.

Mots clés: Physical Sciences

Domaines: Modélisation et simulation

M'hammed Sahnoun, Samuel Bassetto, Soidri Bastoini, Philippe Vialetelle. Optimization of the process control in a semiconductor company. Model and case study of defectivity sampling. International Journal of Production Research, 2010, pp.1. ⟨10.1080/00207543.2010.484429⟩. ⟨hal-00606287⟩