Semi-analytical Magnetic-Structural coupling with contact analysis for MEMS/NEMS

Phuong Pham Quang (1, 2) , Benoît Delinchant (2) , Jean-Louis Coulomb (2) , Bertrand Du Peloux (1)

1 Cedrat
2 G2ELab - Laboratoire de Génie Electrique de Grenoble

This paper presents a methodology and a tool for magnetic and mechanical deformation coupling using numerical and analytical modeling. An analytical magnetic model using Coulombian approach is used and coupled with a mechanical deformation model for a cantilever beam to evaluate contact size and contact force. Such a coupling is not available using numerical solution. This paper details the deformation and contact analysis, which is validated by finite element simulation and also details the coupling approach. Such a modeling is dedicated to an optimization process of magnetic MEMS/NEMS in general and to magnetic nano switch in particular.

Domaines: Energie électrique

Phuong Pham Quang, Benoît Delinchant, Jean-Louis Coulomb, Bertrand Du Peloux. Semi-analytical Magnetic-Structural coupling with contact analysis for MEMS/NEMS. IEEE Transactions on Magnetics, 2011, 47 (5), pp.922-925. ⟨hal-00596833⟩