LiNbO3 Film Bulk Acoustic Resonator

M. Pijolat (1) , S. Loubriat (1) , D. Mercier (1) , A. Reinhardt (1) , E. Defaÿ (1) , C. Deguet (1) , M. Aïd (1) , S. Queste (2) , S. Ballandras (2)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

As layer transfer techniques have been notably improved these passed years, lithium niobate (LiNbO3) appears as a candidate for the next generation of ultra wide band RadioFrequency (RF) filters. Depending on the crystalline orientation, LiNbO3 can achieve electromechanical coupling factors Kt(2) more than 6 times larger than those of sputtered aluminium nitride films. In this paper, a process based on direct bonding, grinding, polishing and Deep Reactive Ion Etching (DRIE) is proposed to fabricate a single crystal LiNbO3 Film Bulk Acoustic Resonator (FBAR). From the fabricated test vehicles K-t(2) of 45% is measured confirming the values predicted by theoretical computations.

Mots clés: MULTILAYERS; WAVES

Domaines: Acoustique [physics.class-ph]; Acoustique [physics.class-ph]

M. Pijolat, S. Loubriat, D. Mercier, A. Reinhardt, E. Defaÿ, et al.. LiNbO3 Film Bulk Acoustic Resonator. 2010 IEEE International Frequency Control Symposium, Jun 2010, New Port Beach, United States. pp.661-664, ⟨10.1109/FREQ.2010.5556245⟩. ⟨hal-00589215⟩