Temperature Compensated Radio-Frequency Harmonic Bulk Acoustic Resonators

T. Baron (1) , Éric Lebrasseur (1) , J.-P. Romand (1) , S. Alzuaga (1) , S. Queste (1) , G. Martin (1) , D. Gachon (1) , T. Laroche (1) , Sylvain Ballandras (2) , Jacques Masson (2)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
2 SENSeOR SAS - SENSeOR SAS

In this paper, we present a new approach for the fabrication and use of thinned single crystal films for the development of radio-frequency temperature compensated devices. We particularly focus on High-overtone bulk acoustic resonators (HBAR) for oscillator stabilization, taking advantage of the very high quality factors achievable with such devices. We obtained a good agreement between simulation and experiments. This paper shows the possibility to obtain device which is intrinsically low sensitive to thermal effects, and even allowing a second order compensation thanks to the Quartz thermal stability.

Mots clés: BAW; Pressure Sensor; HBAR; Temperature compensation

Domaines: Acoustique [physics.class-ph]

T. Baron, Éric Lebrasseur, J.-P. Romand, S. Alzuaga, S. Queste, et al.. Temperature Compensated Radio-Frequency Harmonic Bulk Acoustic Resonators. 2010 IEEE International Ultrasonics Symposium, Jun 2010, New Port Beach, United States. pp.652-655, ⟨10.1109/ULTSYM.2010.5935869⟩. ⟨hal-00578213⟩