Analysis of multifunctional oxycarbide and oxynitride thin films by modulated IR radiometry

Radiometry J Gibkes (1, 2) , F Vaz (3) , a C Fernandes (3) , P Carvalho (3) , F Macedo (4) , R T Faria (3, 5) , P Kijamnajsuk (2, 6) , J Pelzl (2) , B K Bein (2)

1 Georg Agricola University of Applied Sciences
2 Faculty of Physics and Astronomy [Bochum]
3 Center of Physics
4 Center of Physics
5 Physics Sciences Laboratory
6 Faculty of Science

Mots clés: Physical Sciences

Radiometry J Gibkes, F Vaz, a C Fernandes, P Carvalho, F Macedo, et al.. Analysis of multifunctional oxycarbide and oxynitride thin films by modulated IR radiometry. Journal of Physics D: Applied Physics, 2010, 43 (39), pp.395301. ⟨10.1088/0022-3727/43/39/395301⟩. ⟨hal-00569718⟩