Modeling and control of non-contact micromanipulation based on dielectrophoresis.

Mohamed Kharboutly (1) , Michaël Gauthier (1) , Nicolas Chaillet (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Micro and nano-particles can be trapped by a non uniform electric field through the effect of the dielectrophoretic force. Dielectrophoresis (DEP) is used to separate, manipulate and sense micro particles in several domains, such as in biological or Carbon Nano-Tubes (CNTs) manipulations. This paper tackles the creation of a closed loop strategy in order to control, using DEP, the trajectory of micro objects using vision feedback. A modeling of the dielectrophoresis force is presented to illustrate the non linearity of the system and the high dynamics of the object under dielectrophoresis . A control strategy based on the generalized predictive control method is proposed with the aim of controlling the trajectory, taking advantage of the high dynamics despite the non linearity. Simulated results are shown to evaluate our control strategy.

Domaines: Micro et nanotechnologies/Microélectronique

Mohamed Kharboutly, Michaël Gauthier, Nicolas Chaillet. Modeling and control of non-contact micromanipulation based on dielectrophoresis.. 8th France-Japan and 6th Europe-Asia Congress on Mechatronics., Nov 2010, Yokohama, Japan. pp.213-217. ⟨hal-00567119⟩