Development and dynamic modeling of a new hybrid thermo-piezoelectric micro-actuator.

Micky Rakotondrabe (1) , Ioan Alexandru Ivan (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

This paper presents a new hybrid micro-actuator based on the combination of piezoelectric and thermal effects. The proposed actuator can perform both a high stroke coarse positioning through the thermal actuation, and a high resolution fine positioning through the piezoelectric actuation. The micro-actuator structure is a unimorph piezoelectric cantilever, which also constitutes a thermal bimorph that is very sensitive to temperature variation. While electrical voltage is used to control the piezoelectric actuation, we use a Peltier module to provide the temperature variation and to control the thermal functioning. In order to understand the behavior of the hybrid actuator, a model is developped. For better precision but at the same time for model simplicity, the thermal part is modeled with the thermal network whereas the Prandtl-Ishlinskii hysteresis approach is used to model the nonlinearity of the piezoelectric part. Finally, a series of experimental results validate the developed model.

Mots clés: nonlinearity; Hybrid micro-actuator; piezoelectricity; thermal bimorph; unimorph cantilever; dynamic model; thermal network; Prandtl-Ishlinskii hysteresis; nonlinearity.

Domaines: Micro et nanotechnologies/Microélectronique

Micky Rakotondrabe, Ioan Alexandru Ivan. Development and dynamic modeling of a new hybrid thermo-piezoelectric micro-actuator.. IEEE Transactions on Robotics, 2010, 26 (6), pp.1077-1085. ⟨10.1109/TRO.2010.2082032⟩. ⟨hal-00546639⟩