A novel integrated micro-force measurement system for plane-plane contact research.

Wei Dong (1) , David Rostoucher (1) , Michaël Gauthier (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

The evaluation of plane-plane contact force has become a big issue in micro/nano research, for example in micro-assembly. However with the lack of effective experimental equipments, the research on plane-plane contact has been limited to theoretical formulations or virtual simulation. In this paper, a micro-force sensor and precision parallel robot integrated system is proposed for the micro-force measurement of plane-plane contact. In the proposed system, the two objects are fixed on the parallel robot end-platform and the micro-force sensor probe tip, respectively, and the high precision robot system is employed to provide six degree-of-freedoms motion between both objects. So it is convenient for the micro-force measurement between the planar objects with different orientations. As a significant application, the proposed system is utilized for measurements of pull-off force between planar objects, in which the validation of the system is demonstrated in practice. The proposed micro-force measurement system is generic, which can be extended to a variety of micro-force measurements in plane-plane contact.

Domaines: Micro et nanotechnologies/Microélectronique

Wei Dong, David Rostoucher, Michaël Gauthier. A novel integrated micro-force measurement system for plane-plane contact research.. Review of Scientific Instruments, 2010, 81, pp.116101-1 / 116101-3. ⟨10.1063/1.3488382⟩. ⟨hal-00546420⟩