Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table.

Sylwester Bargiel (1) , Kanty Rabenorosoa (1) , Jean-Philippe Mascaro (1) , Cédric Clévy (1) , Christophe Gorecki (1) , Philippe Lutz (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

This work presents a novel approach to the development of MOEMS devices by robotic microassembly of individual micro-optical components onto reconfigurable free-space micro-optical table (RFS-MOT). Various micro-optical elements (e.g. microlenses, micromirrors) are integrated within a generic structure of silicon holders. The holders are manipulated by 3D micro-assembly station with active microgripper, then aligned with nanometer precision within the guiding rails of silicon baseplate, and finally fixed by release of integrated mechanical snap connector. The fabrication of RFS-MOT components involves bulk micromachining of standard silicon wafer (baseplate) or SOI wafer (holders). The design and technology of RFS-MOT is presented. The successful micro-assembly of holders is demonstrated as an experimental validation of the proposed approach. The new method for measuring of position of assembled holder, based on laser triangulation displacement sensor, is described.

Mots clés: MOEMS; micro-assembly; micro-optical table; hybrid integration; microgripper; silicon micromachining; SOI; displacement sensor.; displacement sensor

Domaines: Micro et nanotechnologies/Microélectronique

Sylwester Bargiel, Kanty Rabenorosoa, Jean-Philippe Mascaro, Cédric Clévy, Christophe Gorecki, et al.. Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table.. EUROSENSORS XXIV Conference., Sep 2010, Linz, Austria. pp.428-431, ⟨10.1016/proeng.2010.09.138⟩. ⟨hal-00545451⟩