Towards micro-assembly of hybrid MOEMS components on reconfigurable silicon free-space micro-optical bench.

Sylwester Bargiel (1) , Kanty Rabenorosoa (1) , Cédric Clévy (1) , Christophe Gorecki (1) , Philippe Lutz (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

The 3D integration of hybrid chips is a viable approach for the micro-optical technologies to reduce the costs of assembly and packaging. In this paper a technology platform for the hybrid integration of MOEMS components on a reconfigurable free-space silicon micro-optical bench is presented. In this approach a desired optical component (e.g. micromirror, microlens) is integrated with removable and adjustable silicon holder which can be manipulated, aligned and fixed in the precisely etched rail of the silicon baseplate by use of robotic micro-assembly station. An active-based gripping system allows modification of the holder position on the baseplate with nanometre precision. The fabrication processes of the micromachined parts of the micro-optical bench, based on bulk micromachining of standard silicon wafer and SOI wafer, are described. The successful assembly of the holders, equipped with micromirror and refractive glass ball microlens, on the baseplate rail is demonstrated.

Mots clés: silicon micromachining; Micro-assembly; MOEMS; micro-optical bench; MOB; hybrid integration; silicon micromachining.

Domaines: Optique / photonique; Micro et nanotechnologies/Microélectronique

Sylwester Bargiel, Kanty Rabenorosoa, Cédric Clévy, Christophe Gorecki, Philippe Lutz. Towards micro-assembly of hybrid MOEMS components on reconfigurable silicon free-space micro-optical bench.. Journal of Micromechanics and Microengineering, 2010, 20 (4), 20 p. ⟨10.1088/0960-1317/20/4/045012⟩. ⟨hal-00525274⟩