Principle, characterization and control of a new hybrid thermo-piezoelectric microactuator.

Micky Rakotondrabe (1) , Ioan Alexandru Ivan (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

This paper presents a new actuator based on a unimorph piezocantilever and on the thermal bimorph principle, called hybrid thermopiezoelectric actuator. The main advantage of the proposed actuator is the high range of positioning from the thermal actuation and the high resolution and bandwidth from the piezoelectric one. A characterization and linear modeling are proposed. Finally, we propose an adapted control law to manage the two possible actuation types.

Domaines: Micro et nanotechnologies/Microélectronique

Micky Rakotondrabe, Ioan Alexandru Ivan. Principle, characterization and control of a new hybrid thermo-piezoelectric microactuator.. IEEE International Conference on Robotics and Automation, ICRA'10., May 2010, Anchorage - Alaska, United States. pp.1580-1585. ⟨hal-00504024⟩