Self-oscillation conditions of a resonant-nano-electromechanical mass sensor

Eric Colinet (1) , Laurent Duraffourg (2) , Sebastien Labarthe (2, 3) , Philippe Andreucci (2) , Sebastien Hentz (4) , Philippe Robert (2)

1 DSYS - Département Systèmes
2 DIHS - Département Intégration Hétérogène sur Silicium
3 LPM2C - Laboratoire de physique et modélisation des milieux condensés
4 D2NT - Département Nanotec

This article presents a comprehensive study and design methodology of co-integrated oscillators for nano mass sensing application based on resonant Nano-Electro-Mechanical-System (NEMS). In particular, it reports the capacitive with the piezoresistive transduction schemes in terms of the overall sensor performance. The developed model is clearly in accordance with the general experimental observations obtained for NEMS-based mass detection. The piezoresistive devices are much sensitive (up to 10 zg/√Hz) than capacitive ones (close to 100 zg/√Hz) since they can work at higher frequency. Moreover, the high doped silicon piezoresistive gauge, which is of a great interest for very large scale integration displays similar theoretical resolution than the metallic gauge already used experimentally.

Mots clés: NEMS; oscillator; self-oscillation; mass sensor

Domaines: Physique Générale [physics.gen-ph]

Eric Colinet, Laurent Duraffourg, Sebastien Labarthe, Philippe Andreucci, Sebastien Hentz, et al.. Self-oscillation conditions of a resonant-nano-electromechanical mass sensor. Journal of Applied Physics, 2009, 105, pp.124908. ⟨hal-00446099⟩