In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection

Ervin Mile (1) , Guillaume Jourdan (1) , Igor Bargatin (2) , Sebastien Labarthe (1, 3) , Carine Marcoux (1) , Philippe Andreucci (1) , Sebastien Hentz (4) , Chaddy Kharrat (5) , Eric Colinet (5) , Laurent Duraffourg (1)

1 DIHS - Département Intégration Hétérogène sur Silicium
2 Division of Geological and Planetary Sciences [Pasadena]
3 LPM2C - Laboratoire de physique et modélisation des milieux condensés
4 D2NT - Département Nanotec
5 DSYS - Département Systèmes

We report an actuation/detection scheme with a top-down nano-electromechanical system for frequency shift-based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for in-plane motion transduction. The process fabrication is fully CMOS compatible. The results show a very large dynamic range (DR) of more than 100dB and an unprecedented signal to background ratio (SBR) of 69dB providing an improvement of two orders of magnitude in the detection efficiency presented in the state of the art in NEMS field. Such a dynamic range results from both negligible 1/f-noise and very low Johnson noise compared to the thermomechanical noise. This simple low-power detection scheme paves the way for new class of robust mass resonant sensor.

Mots clés: Nano-electromechanical system; resonator; silicon nanowire

Domaines: Physique Générale [physics.gen-ph]

Ervin Mile, Guillaume Jourdan, Igor Bargatin, Sebastien Labarthe, Carine Marcoux, et al.. In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection. 2010. ⟨hal-00445261⟩