A micro-assembly station used for 3D reconfigurable hybrid MOEMS assembly - (Special Award).

Kanty Rabenorosoa (1) , Cédric Clévy (1) , Philippe Lutz (1) , Sylwester Bargiel (1) , Christophe Gorecki (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Micro-assembly has been identified to be a critical technology in the microsystems technology and nanotechnology. The increasing needs of MOEMS (Micro-Opto-Electro- Mechanical Systems) for the microsystems conducts to development of new concepts and skilled micro-assembly stations. This paper presents a 3D micro-assembly station used for the reconfigurable free space micro-optical benches (RFS-MOB) which are a promising type of MOEMS. The designed parts of RFS-MOB are assembled by using the developped microassembly station. Experimental results are shown and validate the effectiveness of the micro-assembly station and the microassembly strategies.

Domaines: Micro et nanotechnologies/Microélectronique; Optique / photonique

Kanty Rabenorosoa, Cédric Clévy, Philippe Lutz, Sylwester Bargiel, Christophe Gorecki. A micro-assembly station used for 3D reconfigurable hybrid MOEMS assembly - (Special Award).. IEEE International Symposium on Assembly and Manufacturing, ISAM'09., Nov 2009, Suwon, North Korea. pp.95-100. ⟨hal-00435150⟩