Automatic pick-and-place of 40 microns objects using a robotic platform.

David Hériban (1) , Michaël Gauthier (1) , Stéphane Régnier (2) , Nicolas Chaillet (1) , Philippe Lutz (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
2 ISIR - Institut des Systèmes Intelligents et Robotique

Robotic micro-assembly is one way to manufacture new generation of out of plane and/or hybrid microsystems. This approach requires the study of micromanipulation strategies adapted to the microworld and especially to the surface and adhesion forces. We are focusing our works on the study of robotic assembly methods applied to objects whose size is below 100 micrometers. The handling strategy used is based on a two fingered gripper. In order to reduce the adhesion between the gripper and the manipulated objects specific end-effectors have been developed. Moreover, to improve the release reliability we are using a polymer substrate which induces high adhesion with the objet. Some automatic pick-and-places on objects whose typical size is 40 micrometers have been done (cycle time of 1.8 second). There show the reliability of the proposed approach.

Domains: Micro and nanotechnologies/Microelectronics

David Hériban, Michaël Gauthier, Stéphane Régnier, Nicolas Chaillet, Philippe Lutz. Automatic pick-and-place of 40 microns objects using a robotic platform.. 9t International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN'09., Jun 2009, San Sebastian, Spain. pp.515-518. ⟨hal-00404444⟩