Silicon Carbide as a Material for Biomedical Microsystems

Ch. A. Zorman (1)

1 Electrical Engineering and Computer Science Department - Case Western Reserve University

Silicon Carbide (SiC) is emerging as an enabling material for biomedical microsystems due to its uniquecombination of electrical, mechanical and chemical properties combined with its compatibility with Simicromachining techniques. This paper presents an overview of the latest advancements in this areaincluding on-going research to develop SiC for biosensing, bio-microdevice packaging, bio-filtering,biomedical imaging and other related biomedical applications.

Domaines: Micro et nanotechnologies/Microélectronique

Ch. A. Zorman. Silicon Carbide as a Material for Biomedical Microsystems. EDA Publishing Association, pp.7, 2009. ⟨hal-00395712⟩