INTEGRATED 3D SOUND INTENSITY SENSOR WITH FOUR-WIRE PARTICLE VELOCITY SENSORS

Doekle Yntema (1) , Joost van Honschoten (1) , Remco Wiegerink (1)

1 Transducers Science and Technology group, MESA+ Institute for Nanotechnology

A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded “back chamber” at both sides of the chip.

Domaines: Autre [cs.OH]

Doekle Yntema, Joost van Honschoten, Remco Wiegerink. INTEGRATED 3D SOUND INTENSITY SENSOR WITH FOUR-WIRE PARTICLE VELOCITY SENSORS. DTIP 2008, Apr 2008, Nice, France. pp.168-170. ⟨hal-00277701⟩