A three DOF linear ultrasonic motor for transport and micropositionning.

Soukalo Dembélé (1) , Karima Rochdi (1)

1 LAB - Laboratoire d'automatique de Besançon

The paper deals with the study and use of a linear ultrasonic motor at low voltages. Standing waves are generated in a 64 x 38 x 2.5 mm3 vibrator by 20 piezoelectric ceramics and converted into sliding motions by the friction between four legs and the worktop : translations and rotations are achieved. The speed of the motor is studied according to the amplitude and frequency of the driving voltage as well as the mass of the load. Then, a model of the system is retrieved for some set points and validated using a position control. According to its interesting performances for transport and positioning, the motor is used to motorize a moving palet for the transfer of parts in a microassembly workcell.

Mots clés: Linear ultrasonic motor; standing wave ultrasonic motor; piezoelectric ultrasonic motor; vision based localization; micropositioning; microassembly.; microassembly

Domaines: Micro et nanotechnologies/Microélectronique

Soukalo Dembélé, Karima Rochdi. A three DOF linear ultrasonic motor for transport and micropositionning.. Sensors and Actuators A: Physical , 2006, 125, pp.486-493. ⟨10.1016/j.sna.2005.08.001⟩. ⟨hal-00263946⟩