Realization and simulation of wall shear stress integrated sensors

Delphine Meunier (1) , Sedat F. Tardu (2) , Dimitrios Tsamados (1) , Jumana Boussey-Said (1)

1 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
2 LEGI - Laboratoire des Écoulements Géophysiques et Industriels [Grenoble]

In this paper we present the impact of hot wire geometry and fluid characteristics on the efficiency of a hot wire to be used as a wall shear stress sensor. Finite differences and finite elements modelling based simulators were used in order to evaluate the thermal performances of hot wire wall shear stress sensor. Several structures were explored including simple conductor or suspended above a cavity (free and sealed with an oxide membrane). It is found out that wire length, wire section and the dimensions of the micro-cavity lying below the hot wire are of fundamental importance on the thermal exchanges occurring between the hot wire and the fluid.

Mots clés: MEMS; Wall hot film and pressure micro-sensors; Micro-wire over cavity; Numerical simulation; Heat transfer

Domaines: Mécanique des fluides [physics.class-ph]; Mécanique des fluides [physics.class-ph]

Delphine Meunier, Sedat F. Tardu, Dimitrios Tsamados, Jumana Boussey-Said. Realization and simulation of wall shear stress integrated sensors. Microelectronics Journal, 2003, 34, ⟨10.1016/S0026-2692(03)00203-9⟩. ⟨hal-00261997⟩