COMPARISON OF TWO LOW-POWER ELECTRONIC INTERFACES FOR CAPACITIVE MEMS SENSORS

G. Nagy (1) , Z. Szucs (1) , S. Hodossy (1) , M. Rencz (1) , A. Poppe (1)

1 Department of Electron Devices

The paper discusses the importance and the issues of interfacing capacitive sensors. Two architectures applicable for interfacing capacitive sensors are presented. The first solution was designed to interface a capacitive humidity sensor designed and built for a humidity-dependent monolithic capacitor developed at Budapest University of Technology and Economics. The second case presents the possible read-out solutions for a SOI-MEMS accelerometer. Both of the architectures were built and tested in a discrete implementation to qualify the methods before the integrated realization. The paper presents a detailed comparison of the two methods

Mots clés: Design and test techniques for MEMS

Domaines: Autre [cs.OH]; Architectures Matérielles [cs.AR]

G. Nagy, Z. Szucs, S. Hodossy, M. Rencz, A. Poppe. COMPARISON OF TWO LOW-POWER ELECTRONIC INTERFACES FOR CAPACITIVE MEMS SENSORS. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.240-245. ⟨hal-00257695⟩