Modeling of a piezoelectric micro-scanner

A. Chaehoi (1) , M. Begbie (1) , D. Cornez (2) , K. Kirk (2)

1 Institute for System Level Integration
2 School of Engineering and Science

Micro-scanners have been widely used in many optical applications. The micro-scanner presented in this paper uses multimorph-type bending actuators to tilt a square plate mirror. This paper presents a complete analytical model of the piezoelectric micro-scanner. This theoretical model based on strength of material equations calculates the force generated by the multimorphs on the mirror, the profile of the structure and the angular deflection of the mirror. The proposed model, used to optimize the design of the piezoelectric silicon micro-scanner, is intended for further HDL integration, allowing in this way system level simulation and optimization.

Mots clés: Modeling; simulation; CAD tools for MEMS

Domaines: Autre [cs.OH]; Architectures Matérielles [cs.AR]

A. Chaehoi, M. Begbie, D. Cornez, K. Kirk. Modeling of a piezoelectric micro-scanner. DTIP 2007, Apr 2007, Stresa, lago Maggiore, Italy. pp.151-155. ⟨hal-00257679⟩