Influence of Transparent Surface Layer on Effective Thermoreflectance Coefficient of Typical Stacked Electronic Structures

P. L. Komarov (1) , M. G. Burzo (1) , P. E. Raad (1)

1 DEE

It has long been understood that the thermoreflectance coefficient (CTR) varies as a function of light wavelength and material composition. More recent investigations of typical multi-layered electronic devices have uncovered that CTR is also influenced dramatically by the presence of a surface passivation (transparent) layer. It is believed that the effective CTR is made up of a combination of an intrinsic value and a contribution resulting from the interference of the light beams reflecting from the interfaces of the layers in the light path.

Mots clés: Thermography; thermoreflectance coefficient; calibration; non-contact temperature mapping

Domaines: Science des matériaux [cond-mat.mtrl-sci]

P. L. Komarov, M. G. Burzo, P. E. Raad. Influence of Transparent Surface Layer on Effective Thermoreflectance Coefficient of Typical Stacked Electronic Structures. THERMINIC 2007, Sep 2007, Budapest, Hungary. pp.126-127. ⟨hal-00202547⟩