60GHz Interdigitated SOI integrated dipole antenna with a CPW balun
Résumé
In this paper, we propose a 60 GHz fully integrated dipole antenna on 0.13 @m silicon on insulator (SOI) substrate, incorporating an interdigitated capacitor. An integrated balun has been designed on the top level layer to assure a compatibility with the test devices. The balun is completely characterized on SOI substrate for subsequent de-embedding of the antenna impedance. The design was based on electromagnetic simulations made using the CST Microwave Studio software package. The antenna exhibits an excellent impedance matching to 50 Ohms at 60GHz with a bandwidth of 10%. The radiation of the integrated structure has been carefully studied and optimisation of the efficiency has been obtained using the back side metallization under the wafer as a reflector. The resulting radiation efficiency is 90 % with a gain around 4.45 dBi .
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