APPLICATION OF MEMS TECHNOLOGY TO MICRO DIRECT METHANOL FUEL CELL

Xiaowei Liu (1) , Chunguang Suo (1) , Yufeng Zhang (1) , Haifeng Zhang (1) , Ch. Dhum (1) , Weiping Chen (1) , Xuebin Lu (1)

1 HIT - Harbin Institute of Technology

In view of micro fuel cells, the silicon processes are employed for microfabrication of the micro direct methanol fuel cell (µDMFC). Using the MEMS technology we have successfully made single µDMFC as small as 10mm×8mm×3mm. The main reason for the use of MEMS processes is the prospective potential for miniaturization and economical mass production of small fuel cells. The double side deep wet etching for the gas channel and fuel chamber preparation and the formation of porous silicon (PS) layers for electrode supports by electrochemical process are the key technologies to improve the MEMS-based µDMFC. Moreover, for the first time, the fabrication of electro-catalytic electrodes using electroless plating platinum and ruthenium (Pt-Ru) co-deposition method over PS substrates is introduced. Using the MEMS technology makes the batch fabrication of µDMFCs much easier and reduces the usage of rare metals.

Mots clés: MINIATURIZED POWER GENERATORS

Domaines: Architectures Matérielles [cs.AR]

Xiaowei Liu, Chunguang Suo, Yufeng Zhang, Haifeng Zhang, Ch. Dhum, et al.. APPLICATION OF MEMS TECHNOLOGY TO MICRO DIRECT METHANOL FUEL CELL. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. 6 p. ⟨hal-00189313⟩