A KU-BAND NOVEL MICROMACHINED BANDPASS FILTER WITH TWO TRANSMISSION ZEROS

Zhang Yong (1) , Zhu Jian (1) , Yu Yuanwei (1) , Chen Chen (1, 2) , Jia Shi Xing (1)

1 Nanjing Electronic Devices Institute
2 Dep. of Physics

This paper presents a micromachined bandpass filter with miniature size that has relatively outstanding performance. A silicon-based eight-order microstrip bandpass filter is fabricated and measured. A novel design method of the interdigital filter that can create two transmission zeros is described. The location of the transmission zeros can be shifted arbitrarily in the stopband. By adjusting the zero location properly, the filter provides much better skirt rejection and lower insertion loss than a conventional microstrip interdigital filter. To reduce the chip size, through-silicon-substrate-via-hole is used. Good experimental results are obtained.

Mots clés: microfabrication; Micro-opto-electro-mechanical system (MOEMS); scanning mirror; assembly; microfabrication.

Domaines: Architectures Matérielles [cs.AR]

Zhang Yong, Zhu Jian, Yu Yuanwei, Chen Chen, Jia Shi Xing. A KU-BAND NOVEL MICROMACHINED BANDPASS FILTER WITH TWO TRANSMISSION ZEROS. DTIP 2006, Apr 2006, Stresa, Lago Maggiore, Italy. pp.266-269. ⟨hal-00189297⟩