A Coupled Thermoreflectance Thermography Experimental System and Ultra-Fast Adaptive Computational Engine for the Complete Thermal Characterization of Three-Dimensional Electronic Devices: Validation

Peter E. Raad (1) , Pavel L. Komarov (1) , M. Burzo (1)

1 Nanoscale Electro-thermal Sciences Laboratory

This work builds on the previous introduction [1] of a coupled experimental-computational system devised to fully characterize the thermal behavior of complex 3D submicron electronic devices. The new system replaces the laser-based surface temperature scanning approach with a CCD camera-based approach. As before, the thermo-reflectance thermography system is used to non-invasively measure with submicron resolution the 2D surface temperature field of an activated device. The measured temperature field is then used as input for an ultra-fast inverse computational solution to fully characterize the thermal behavior of the complex three-dimensional device. For the purposes of this investigation, basic micro-heater devices were built, activated, and measured. In order to quantitatively validate the coupled experimental-computational system, the system was used to extract geometric features of a known device, thus assessing the system's ability to combine measured experimental results and computations to fully characterize complex 3D electronic devices.

Mots clés: Coupled experimental-numerical; ultra-fast adaptive computational engine; three-dimensional thermal characterization; complex electronic devices; validation; inverse solution

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Peter E. Raad, Pavel L. Komarov, M. Burzo. A Coupled Thermoreflectance Thermography Experimental System and Ultra-Fast Adaptive Computational Engine for the Complete Thermal Characterization of Three-Dimensional Electronic Devices: Validation. THERMINIC 2006, Sep 2006, Nice, France. pp.138-143. ⟨hal-00171369⟩