The method of non-linear distortions elimination in photoacoustic investigation of layered semiconductor structure

Z. Suszynski (1) , R. Duer (1) , M. Kosikowski (1)

1 Dept of Electronics and Comp Science

This paper presents the consideration of the presence and the influence of non-linear distortion of photo-acoustic measurement set-up on the results of thermal properties analysis for the multi-layer semiconductor structure. The authors propose a method which will eliminate such an influence.

Mots clés: photo-acoustic signal; frequency spectrum; contrast method; thermal properties

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Z. Suszynski, R. Duer, M. Kosikowski. The method of non-linear distortions elimination in photoacoustic investigation of layered semiconductor structure. THERMINIC 2006, Sep 2006, Nice, France. pp.54-58. ⟨hal-00171354⟩