BOTTOM-UP APPROACH TO SILICON NANOELECTRONICS

Hiroshi Mizumita (1) , S. Oda (1)

1 Quantum Nanoelectronics Research Center

This paper presents a brief review of our recent work investigating a novel bottom-up approach to realize silicon based nanoelectronics. We discuss fabrication technique, electronic properties and device applications of silicon nanodots as a building block for nanoscale silicon devices.

Mots clés: Silicon; nanoelectronics; nanodots

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Hiroshi Mizumita, S. Oda. BOTTOM-UP APPROACH TO SILICON NANOELECTRONICS. ENS 2005, Dec 2005, Paris, France. pp.103-108. ⟨hal-00166992⟩