Direct ultrafast laser micro-structuring of materials using programmable beam shaping

Nicolas Sanner (1) , Nicolas Huot (1) , Eric Audouard (1) , Christian Larat (2) , Jean-Pierre Huignard (2)

1 LHC - Laboratoire Hubert Curien
2 Thales Research and Technology [Palaiseau]

Using active and programmable focal-spot shaping, we demonstrate direct femtosecond laser micro-structuring of materials. Surface marking as well as drilling with user-defined geometrical shapes of small dimensions (20 µm) are performed, without moving the laser beam nor the material target.

Mots clés: Keywords: femtosecond laser processing; laser beam shaping

Domaines: Optique [physics.optics]

Nicolas Sanner, Nicolas Huot, Eric Audouard, Christian Larat, Jean-Pierre Huignard. Direct ultrafast laser micro-structuring of materials using programmable beam shaping. Optics and Lasers in Engineering, 2007, 45, pp.737-741. ⟨ujm-00136894⟩