Micro modulateur spatial de lumière transmissif pour modulation de phase et d’amplitude

Abstract : LETI possesses an expertise allowing to realize Spatial Light Modulators (SLMs) made in microelectronic technology on silicon, having very high resolutions and very small pixel steps. LETI wishes to use a specific LCD technology (IPS technology), on the one hand the electro-optical performances in the field of micro-display had to be investigated but on the other hand allows to keep costs down and reduce the number of manufacturing steps. The objective of this thesis is to evaluate on the basis of simulations and technical achievements, the performance of a micro-SLM IPS used in phase modulation and amplitude.Our investigations have been carried out on four major areas of study. The first axis is the search and testing of a specific software (LCDMaster) to simulate liquid crystal cells and floating electrodes. The second axis according to different designs of pixel and the different liquid crystal alignment modes (Homogeneous, vertical and twisted) with an IPS type control, to investigate the performances in modulation phase. The best results were obtained for a vertical alignment providing a phase shift of 2π. In addition, the performance of an adaptive optics device integrating the studied SLM has been investigated. The third axis of study focused on the performance investigation of a liquid crystal SLM with an IPS-type control using a homogeneous alignment in amplitude modulation (static and dynamic study). This study also makes it possible to study the possibilities of reducing the response time of the cell. It resulted in two SLM designs. The first design with two levels of electrodes separated by an insulator to reproduce a Faraday type effect. The second has drastically reduced the response time. The fourth area of research consists in testing prototypes based on these two designs to validate the performances obtained in simulation. Concordant results have been obtained and new types of IPS-controlled SLMs with state-of-the-art refreshing times have thus been designated and characterized.
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Clément Abelard. Micro modulateur spatial de lumière transmissif pour modulation de phase et d’amplitude. Micro et nanotechnologies/Microélectronique. Université Grenoble Alpes, 2018. Français. ⟨NNT : 2018GREAT092⟩. ⟨tel-02136795⟩

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