Silicone oil contamination and electrical contact resistance degradation of low-force gold contacts', Microelectromechanical Systems, Journal, vol.16, issue.1, pp.24-28, 2007. ,
A parameter study of separation modes of adhering microcontacts, Journal of Applied Physics, vol.103, issue.6, p.64902, 2008. ,
DOI : 10.1063/1.2874434
Mems microswitches for reconfigurable microwave circuitry', Microwave and Wireless Components Letters, IEEE, vol.11, issue.3, pp.106-108, 2001. ,
DOI : 10.1109/7260.915617
Étude expérimentale et modélisation du contact électrique et mécanique quasi-statique entre surfaces rugueuses d'or : application aux micro-relais MEMS, 2010. ,
Hardening of Low-Alloyed Gold, Gold Bulletin, vol.22, issue.3, pp.120-131, 2005. ,
DOI : 10.1007/BF03215246
Asperity contacts at the nanoscale: Comparison of Ru and Au, Journal of Applied Physics, vol.104, issue.7, p.74320, 1975. ,
DOI : 10.1063/1.2991301
The Effect of Surface Roughness on the Adhesion of Elastic Solids, Royal Society of London Proceedings Series A 345, pp.327-342, 1975. ,
DOI : 10.1098/rspa.1975.0138
Industry study on issues of MEMS reliability and accelerated lifetime testing, 2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual., pp.312-316, 2005. ,
DOI : 10.1109/RELPHY.2005.1493104
Electrical and tensile properties of Cu-ThO2, Au-ThO2, Pt-ThO2 and Au-Al2O3, Pt-Al2O3 alloys, Journal of Materials Science, vol.201, issue.12, pp.1078-1086, 1970. ,
DOI : 10.1007/BF02403281
Reliability and performance characterization of a mems-based non-volatile switch, in 'Reliability Physics Symposium (IRPS), IEEE, pp.2-2, 1989. ,
The development of 990 gold ??? titanium: Its production, use and properties, Gold Bulletin, vol.16, issue.3, pp.173-181, 1989. ,
DOI : 10.1007/BF03214709
Investigation into contact resistance and damage of metal contacts used in RF-MEMS switches, PhD thesis, Air Force Institute of Technology, 2001. ,
Lifetime characterization of capacitive rf mems switches, in 'Microwave Symposium Digest, IEEE MTT-S International', vol.11, pp.227-230, 2001. ,
Demonstrating reliability', Microwave Magazine, IEEE, vol.8, issue.6, pp.56-60, 2007. ,
DOI : 10.1109/mmm.2007.907197
The interrelation between adhesion, contact creep, and roughness on the life of gold contacts in radio-frequency microswitches, Journal of Applied Physics, vol.100, issue.9, 2006. ,
DOI : 10.1063/1.2363745
The Deformation and Ageing of Mild Steel: III Discussion of Results, Proceedings of the Physical Society. Section B 64, p.747, 1951. ,
DOI : 10.1088/0370-1301/64/9/303
Dispersion-strengthened gold, Gold Bulletin, vol.8, issue.4, pp.76-80, 1976. ,
DOI : 10.1007/BF03215407
New micromachined membrane switches in silicon technology, 47th IEEE Holm Conference on Electrical Contacts, pp.397-401, 2001. ,
DOI : 10.1109/TCAPT.2002.804611
Effect of nanoscale heating on electrical transport in rf mems switch contacts', Microelectromechanical Systems, pp.14-935, 2005. ,
Integrated electrothermal modeling of RF MEMS switches for improved power handling capability, Proceedings of the 16th International Symposium on Power Semiconductor Devices & IC's, pp.10-11, 2003. ,
DOI : 10.1109/WCT.2003.1321420
Contact mechanics and the wear of metals, Wear, vol.190, issue.2, pp.162-170, 1995. ,
DOI : 10.1016/0043-1648(95)06665-9
Surface Energy and the Contact of Elastic Solids, Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, vol.324, issue.1558, pp.301-313, 1558. ,
DOI : 10.1098/rspa.1971.0141
A compact model for spherical rough contacts, Journal of Tribology, vol.127, issue.4, pp.884-889, 2005. ,
Methodology to analyze failure mechanisms of ohmic contacts on mems switches, in 'Reliability Physics Symposium, IEEE, pp.869-873, 2009. ,
Selective image analysis for roughness characterisation, Tribology -Materials, Surfaces and Interfaces, pp.136-143, 2010. ,
DOI : 10.1109/HOLM.2009.5284386
URL : https://hal.archives-ouvertes.fr/emse-00533815
The interrelation between adhesion, contact creep, and roughness on the life of gold contacts in radio-frequency microswitches, Journal of Applied Physics, vol.100, issue.9, 2006. ,
DOI : 10.1063/1.2363745
Effect of intermittent fretting on corrosion behavior in electrical contact, Wear, vol.268, issue.3-4, pp.3-4, 2010. ,
DOI : 10.1016/j.wear.2009.08.021
Fundamental studies of au contacts in mems rf switches', Tribology Letters, pp.215-230, 2005. ,
Stress and grain growth in thin films, Journal of the Mechanics and Physics of Solids, vol.44, issue.5, pp.657-673, 1996. ,
DOI : 10.1016/0022-5096(96)00022-1
Etude des mécanismes de défaillance du contact électrique dans un micro-interrupteur en technologie MEMS, 2010. ,
The evolution of fretting wear in a micro-spherical contact, Wear, vol.270, issue.9-10, pp.567-575, 2011. ,
DOI : 10.1016/j.wear.2011.01.013
Un paramètre d'ajustement sur la surface de contact est introduit pour prendre en compte l'écart entre surface mécanique de contact et surface conductrice, 2009. ,
A compact model for spherical rough contacts, Journal of Tribology, vol.127, issue.4, pp.884-889, 2005. ,
Improvements in the indentation method with a surface force apparatus, Philosophical Magazine A, vol.16, issue.5, pp.1061-1072, 1996. ,
DOI : 10.1088/0022-3727/25/3/025
Wear and mechanical characterisation on micro- to picoscales using AFM, International Materials Reviews, vol.48, issue.3, pp.105-117, 1999. ,
DOI : 10.1016/S0043-1648(98)00218-X
Improved micro-contact resistance model that considers material deformation, electron transport and thin film characteristics', Electrical Contacts, Proceedings of the 55th IEEE Holm Conference on pp, pp.298-302, 2009. ,
Étude expérimentale et modélisation du contact électrique et mécanique quasi-statique entre surfaces rugueuses d'or : application aux micro-relais MEMS, 2010. ,
Asperity contacts at the nanoscale: Comparison of Ru and Au, Journal of Applied Physics, vol.104, issue.7, p.74320, 2008. ,
DOI : 10.1063/1.2991301
The contact of two nominally flat rough surfaces, Proc. Instn. Mech. Engrs. 185, pp.625-633, 1971. ,
DOI : 10.1243/PIME_PROC_1970_185_069_02
Contact mechanics and the wear of metals, Wear, vol.190, issue.2, pp.162-170, 1995. ,
DOI : 10.1016/0043-1648(95)06665-9
Adhesion in elastic???plastic spherical microcontact, Journal of Colloid and Interface Science, vol.261, issue.2, pp.372-378, 2003. ,
DOI : 10.1016/S0021-9797(03)00071-7
Electron transport through a circular constriction, Physical Review B, vol.60, issue.6, pp.3963-3969, 1999. ,
DOI : 10.1103/PhysRevB.60.3963
Indentation size effects in crystalline materials: A law for strain gradient plasticity, Journal of the Mechanics and Physics of Solids, vol.46, issue.3, pp.411-425, 1998. ,
DOI : 10.1016/S0022-5096(97)00086-0
Contact resistance of thin metal film contacts', Components and Packaging Technologies, IEEE Transactions on, vol.29, issue.2, pp.371-378, 2006. ,
Modélisation 3d de la résistance de constriction à l'aide du logiciel comsol v34 -effet de l'épaisseur de l'électrode, 2008. ,
A Nano-Scale Investigation of Material Transfer Phenomena at Make in a MEMS Switch, 2011 IEEE 57th Holm Conference on Electrical Contacts (Holm), pp.1-7, 2011. ,
DOI : 10.1109/HOLM.2011.6034801
Electrical contacts : principles and applications, 1999. ,
DOI : 10.1201/b15640
The size effect and the non-local Boltzmann transport equation in orifice and disk geometry, Proceedings of the Physical Society 927. [Yastrebov et al, 1966. ,
DOI : 10.1088/0370-1328/89/4/316
Rough surface contact analysis by means of the finite element method and of a new reduced model Surface mechanics : facts and numerical models, Comptes Rendus Mécanique, vol.339, issue.78, pp.473-490, 2011. ,
An Asperity Microcontact Model Incorporating the Transition From Elastic Deformation to Fully Plastic Flow, Journal of Tribology, vol.122, issue.1, pp.86-93, 2000. ,
DOI : 10.1115/1.555332