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Conception et Réalisation de Micro-capteurs de Force à base de Jauges Piézorésistives pour la Caractérisation Mécanique d'Assemblages Cellulaires en Milieu Liquide

Abstract : The use of microtechnologies enables the fabrication of various kinds of sensors that can be used to perform both the electrical and mechanical characterization of living cells.

In this context, the goal of the present work is to develop a mechanical force/electrical voltage
transducer whose sensitive axis is in-plane with respect to the cell support wafer.

The designed structures are based on the piezo-resistive effect present in silicon used to make strain gauges. The architecture was especially developed to obtain sensitivities of around 10 N-1 on this axis.

The modeling and the optimization of the performances led to the fabrication of compact strain gauges composed of two levels of boron doped polysilicon, and encapsulated in three layers of low-stress silicon nitride. The whole structure is implemented on a silicon-on-insulator (SOI) layer ; a new fabrication process was developed to form these gauges. Moreover, the influence of a misalignment of the gauge over the cantilever was studied and verified during the characterisation.

Strain gauge sensitivities of the order of 30x10-6 ?N-1 were obtained with a 170 ?m long and 6.5 ?m wide gauge. The applications for this kind of strain gauge are numerous given the high quality performances obtained here, the performances are comparable to commercial AFM cantilevers.
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Submitted on : Wednesday, February 14, 2007 - 6:38:26 PM
Last modification on : Saturday, October 9, 2021 - 3:19:08 AM
Long-term archiving on: : Wednesday, April 7, 2010 - 12:01:35 AM

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  • HAL Id : tel-00131024, version 1

Citation

Jean-Baptiste Bureau. Conception et Réalisation de Micro-capteurs de Force à base de Jauges Piézorésistives pour la Caractérisation Mécanique d'Assemblages Cellulaires en Milieu Liquide. Micro et nanotechnologies/Microélectronique. Université des Sciences et Technologie de Lille - Lille I, 2006. Français. ⟨tel-00131024⟩

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