Description of an interferometric photothermal microscope and its application to the study of semiconductor samples

Karsten Haupt , A. Glazov , H. Walther , E. Döpel

A computerized scanning microscope is described which is equipped with a photothermal sensor. Two types of sensors have been developed both being based on probing the thermal lens above the heating spot by a Mach-Zehnder interferometer. One interferometer was built up from separate optical components while the other one was designed as a microoptical block connected by a gradient index lens and optical fibres with a laser diode and a photodiode. Measurements from structured semiconductors are presented demonstrating the performance of the photothermal microscope.

Domaines: Articles anciens

Karsten Haupt, A. Glazov, H. Walther, E. Döpel. Description of an interferometric photothermal microscope and its application to the study of semiconductor samples. Journal de Physique IV Proceedings, 1994, 04 (C7), pp.C7-11-C7-14. ⟨10.1051/jp4:1994703⟩. ⟨jpa-00253144⟩