The thermodynamic properties of tetraethoxysilane (TEOS) and an infrared study of its thermal decomposition

M.G.M. van Der Vis , E. Cordfunke , R. Konings

A review is given on the determination of the thermodynamic properties of Si(OC2H5)4 (TEOS, tetraethoxysilane). In addition, the thermal decomposition of TEOS has been studied by in-situ IR spectroscopy. The decomposition products in the gas phase in the absence of oxygen are organic fragments (ethanol, ethanal, ethene, methane, carbon monoxide), and in the presence of oxygen water, carbon dioxide, ethanal and methanal. The results are compared with thermodynamic equilibrium calculations and kinetic models.

Domaines: Articles anciens

M.G.M. van Der Vis, E. Cordfunke, R. Konings. The thermodynamic properties of tetraethoxysilane (TEOS) and an infrared study of its thermal decomposition. Journal de Physique IV Proceedings, 1993, 03 (C3), pp.C3-75-C3-82. ⟨10.1051/jp4:1993309⟩. ⟨jpa-00251366⟩