FOCUSED DROPLET BEAM FROM A GOLD LIQUID METAL ION SOURCE

Gérard Benassayag , Jean Orloff , L. Swanson

A gold LMIS has been used in the charged droplet emission mode with a single lens focusing column operating at 20 kV beam voltage to achieve a deposit size at the target of 2.3 to 6.0 depending on the exposure time. The net mass deposit rate maximized at 1.5 µm3/s. From the focusing characteristics an energy spread of 50 V and an energy deficit of 350 to 500 V could be inferred for the charged droplet beam.

Domaines: Articles anciens

Gérard Benassayag, Jean Orloff, L. Swanson. FOCUSED DROPLET BEAM FROM A GOLD LIQUID METAL ION SOURCE. Journal de Physique Colloques, 1986, 47 (C7), pp.C7-389-C7-397. ⟨10.1051/jphyscol:1986766⟩. ⟨jpa-00225961⟩